Focused ion beam generated antimony nanowires for microscale pH sensors

We demonstrate the formation of a complementary metal-oxide semiconductor compatible micro scale pH sensor with an antimony (Sb) nanowire network as the solid state pH electrode. The sensor is formed combining well known semiconductor processing techniques with a focused ion beam based approach indu...

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Veröffentlicht in:Applied physics letters 2009-11, Vol.95 (22)
Hauptverfasser: Avdić, A., Lugstein, A., Schöndorfer, C., Bertagnolli, E.
Format: Artikel
Sprache:eng
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Zusammenfassung:We demonstrate the formation of a complementary metal-oxide semiconductor compatible micro scale pH sensor with an antimony (Sb) nanowire network as the solid state pH electrode. The sensor is formed combining well known semiconductor processing techniques with a focused ion beam based approach inducing the self assembled formation of Sb nanowires in room temperature ambient without using any additional material source. The microscale pH sensor shows a highly linear relation in standardized pH buffer solutions with a sensitivity of 55.9 mV/pH and a very short response time of less than 8 s.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.3266860