Focused ion beam generated antimony nanowires for microscale pH sensors
We demonstrate the formation of a complementary metal-oxide semiconductor compatible micro scale pH sensor with an antimony (Sb) nanowire network as the solid state pH electrode. The sensor is formed combining well known semiconductor processing techniques with a focused ion beam based approach indu...
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Veröffentlicht in: | Applied physics letters 2009-11, Vol.95 (22) |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We demonstrate the formation of a complementary metal-oxide semiconductor compatible micro scale pH sensor with an antimony (Sb) nanowire network as the solid state pH electrode. The sensor is formed combining well known semiconductor processing techniques with a focused ion beam based approach inducing the self assembled formation of Sb nanowires in room temperature ambient without using any additional material source. The microscale pH sensor shows a highly linear relation in standardized pH buffer solutions with a sensitivity of 55.9 mV/pH and a very short response time of less than 8 s. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.3266860 |