Ranges of 10–30-keV deuterons implanted into solids

Ranges of 10–30-keV deuterons implanted into solids

Ranges of 10–30-keV deuterons implanted into amorphous C, and polycrystalline Al, Ni, and Zr have been measured via the D(3He,α)1H nuclear reaction. The finite depth resolution, which has been determined separately, was taken into account in the evaluation of the data. Monte Carlo computer calculati...

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Veröffentlicht in:J. Appl. Phys.; (United States) 1978-08, Vol.49 (8), p.4401-4405
Hauptverfasser: Borgesen, P., Bottiger, J., Moeller, W.
Format: Artikel
Sprache:eng
Schlagworte:
ALUMINIUM
AMORPHOUS STATE
CHARGED PARTICLES
CHEMICAL ANALYSIS
COPPER
CRYSTALS
DEPTH DOSE DISTRIBUTIONS
DEUTERONS
ELEMENTS
ENERGY RANGE
ION IMPLANTATION
KEV RANGE
KEV RANGE 10-100
METALS
MONTE CARLO METHOD
NICKEL
NUCLEAR PHYSICS AND RADIATION PHYSICS
NUCLEAR REACTION ANALYSIS
PHYSICAL RADIATION EFFECTS
POLYCRYSTALS
RADIATION DOSE DISTRIBUTIONS
RADIATION EFFECTS
RANGE
SPATIAL DOSE DISTRIBUTIONS
STOPPING POWER
TRANSITION ELEMENTS 654001 > Radiation & Shielding Physics-- Radiation Physics, Shielding Calculations & Experiments
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Beschreibung
Zusammenfassung:Ranges of 10–30-keV deuterons implanted into amorphous C, and polycrystalline Al, Ni, and Zr have been measured via the D(3He,α)1H nuclear reaction. The finite depth resolution, which has been determined separately, was taken into account in the evaluation of the data. Monte Carlo computer calculations have been carried out for comparison with the experimental results. Generally, good qualitative agreement is observed.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.325492