Metal modulation epitaxy growth for extremely high hole concentrations above 1019cm−3 in GaN
The free hole carriers in GaN have been limited to concentrations in the low 1018cm−3 range due to the deep activation energy, lower solubility, and compensation from defects, therefore, limiting doping efficiency to about 1%. Herein, we report an enhanced doping efficiency up to ∼10% in GaN by a pe...
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Veröffentlicht in: | Applied physics letters 2008-10, Vol.93 (17) |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The free hole carriers in GaN have been limited to concentrations in the low 1018cm−3 range due to the deep activation energy, lower solubility, and compensation from defects, therefore, limiting doping efficiency to about 1%. Herein, we report an enhanced doping efficiency up to ∼10% in GaN by a periodic doping, metal modulation epitaxy growth technique. The hole concentrations grown by periodically modulating Ga atoms and Mg dopants were over ∼1.5×1019cm−3. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.3005640 |