Two-dimensional growth of lattice matched Nd-doped (Gd,Lu)2O3 films on Y2O3 by pulsed laser deposition
This letter focuses on epitaxial growth of a 1-μm-thick lattice matched Nd-doped monocrystalline (Gd,Lu)2O3 film deposited on a {100} oriented Y2O3 substrate by pulsed laser deposition. Layer-by-layer growth indicated by in situ reflection high energy electron diffraction was observed up to film thi...
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Veröffentlicht in: | Applied physics letters 2008-08, Vol.93 (5) |
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Hauptverfasser: | , , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | This letter focuses on epitaxial growth of a 1-μm-thick lattice matched Nd-doped monocrystalline (Gd,Lu)2O3 film deposited on a {100} oriented Y2O3 substrate by pulsed laser deposition. Layer-by-layer growth indicated by in situ reflection high energy electron diffraction was observed up to film thicknesses of 100nm. The subsequent growth behavior could be explained by a multilevel growth mode. Thus, the growth mode was two-dimensional and epitaxial. Lattice matching of up to 99.3% was achieved. The evolution of the structural and topographical properties of the films was verified by ex situ x-ray diffraction analysis and atomic force microscopy, respectively. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2967870 |