Sensitivity dependence of Hall biosensor arrays with the position of superparamagnetic beads on their active regions

This paper describes a numerical and experimental analysis on the variation of the magnetic sensitivity of the active surface region of AlGaAs∕InGaAs two dimensional electron gas Hall effect biosensors with location and number of superparamagnetic beads. Experiments were conducted using linear arrays of devices consisting of ten sensors each with an area of 5×5μm2. The edges and corners of the Hall sensors were most sensitive and exhibited a linear response. These results are important for commercialization of high sensitivity Hall effect biosensors with a wide dynamic range.