Ultrasensitive mass balance based on a bulk acoustic mode single-crystal silicon resonator
A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of 125 pg ∕ cm 2 is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of 2.182 MHz , with a quality factor exce...
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| Veröffentlicht in: | Applied physics letters 2007-12, Vol.91 (23), p.234103-234103-3 |
|---|---|
| Hauptverfasser: | , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | A single-crystal silicon resonant bulk acoustic mass sensor with a measured resolution of
125
pg
∕
cm
2
is presented. The mass sensor comprises a micromachined silicon plate that is excited in the square-extensional bulk acoustic resonant mode at a frequency of
2.182
MHz
, with a quality factor exceeding
10
6
. The mass sensor has a measured mass to frequency shift sensitivity of
132
Hz
cm
2
∕
μ
g
. The resonator element is embedded in a feedback loop of an electronic amplifier to implement an oscillator with a short term frequency stability of better than
7
ppb
at an operating pressure of
3.8
mTorr
. |
|---|---|
| ISSN: | 0003-6951 1077-3118 |
| DOI: | 10.1063/1.2822405 |