Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

We demonstrated enhancement of in-band conversion efficiency (CE) at 13.5nm of the extreme ultraviolet (EUV) emission from a tin (Sn) cavity target irradiated by a CO2 laser pulse. Whereas a planar Sn target produced an in-band CE of around 2%, the use of cavity targets significantly enhanced the EU...

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Veröffentlicht in:	Applied physics letters 2007-12, Vol.91 (23)
Hauptverfasser:	Ueno, Yoshifumi, Soumagne, Georg, Sumitani, Akira, Endo, Akira, Higashiguchi, Takeshi
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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