Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

Enhancement of extreme ultraviolet emission from a CO2 laser-produced Sn plasma using a cavity target

We demonstrated enhancement of in-band conversion efficiency (CE) at 13.5nm of the extreme ultraviolet (EUV) emission from a tin (Sn) cavity target irradiated by a CO2 laser pulse. Whereas a planar Sn target produced an in-band CE of around 2%, the use of cavity targets significantly enhanced the EU...

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Veröffentlicht in:Applied physics letters 2007-12, Vol.91 (23)
Hauptverfasser: Ueno, Yoshifumi, Soumagne, Georg, Sumitani, Akira, Endo, Akira, Higashiguchi, Takeshi
Format: Artikel
Sprache:eng
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Zusammenfassung:We demonstrated enhancement of in-band conversion efficiency (CE) at 13.5nm of the extreme ultraviolet (EUV) emission from a tin (Sn) cavity target irradiated by a CO2 laser pulse. Whereas a planar Sn target produced an in-band CE of around 2%, the use of cavity targets significantly enhanced the EUV emission energy and the EUV CE. An EUV CE of 4% was observed for a Sn cavity target with a depth of 200μm which is one of the highest values ever reported.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2820451