Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing

The authors proposed a customizable multiple beam multiphoton polymerization micronano fabrication method for parallel processing of assembled structures. The configuration and geometry of multiple beams were designed by changing the parameters of lenses set as well as aperture masks. Various assembled two-dimensional and three-dimensional microstructures including microgears and photonic crystals were demonstrated under nanometer scale resolution and high fabrication efficiency. The proposed micronanofabrication method could be expected to play an important role in the fabrication of micromachines and microdevices.