Efficient extreme ultraviolet plasma source generated by a CO2 laser and a liquid xenon microjet target

We demonstrated efficacy of a CO2-laser-produced xenon plasma in the extreme ultraviolet (EUV) spectral region at 13.5nm at variable laser pulse widths between 200ps and 25ns. The plasma target was a 30μm liquid xenon microjet. To ensure the optimum coupling of CO2 laser energy with the plasma, they...

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Veröffentlicht in:Applied physics letters 2007-05, Vol.90 (19)
Hauptverfasser: Ueno, Yoshifumi, Ariga, Tatsuya, Soumagne, George, Higashiguchi, Takeshi, Kubodera, Shoichi, Pogorelsky, Igor, Pavlishin, Igor, Stolyarov, Daniil, Babzien, Marcus, Kusche, Karl, Yakimenko, Vitaly
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Sprache:eng
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Zusammenfassung:We demonstrated efficacy of a CO2-laser-produced xenon plasma in the extreme ultraviolet (EUV) spectral region at 13.5nm at variable laser pulse widths between 200ps and 25ns. The plasma target was a 30μm liquid xenon microjet. To ensure the optimum coupling of CO2 laser energy with the plasma, they applied a prepulse yttrium aluminum garnet laser. The authors measured the conversion efficiency (CE) of the 13.5nm EUV emission for different pulse widths of the CO2 laser. A maximum CE of 0.6% was obtained for a CO2 laser pulse width of 25ns at an intensity of 5×1010W∕cm2.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2738190