Multiscale model for atomic force microscope array mechanical behavior

The author presents a first simplified two-scale model of the elastic structure of an atomic force microscope array. It can be used for rapid prototyping and for designing model based control loops. Its derivation is based on the concept of two-scale approximation.

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Veröffentlicht in:Applied physics letters 2007-02, Vol.90 (9), p.091908-091908-3
1. Verfasser: Lenczner, M.
Format: Artikel
Sprache:eng
Online-Zugang:Volltext
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Beschreibung
Zusammenfassung:The author presents a first simplified two-scale model of the elastic structure of an atomic force microscope array. It can be used for rapid prototyping and for designing model based control loops. Its derivation is based on the concept of two-scale approximation.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2710001