Reduction in feature size of two-photon polymerization using SCR500

Fabricated by femtosecond laser pulses at wavelength λ of 780 nm , the feature size of two-photon polymerization using SCR500 was reduced to λ ∕ 50 . Lines with sub- 25 - nm width were produced by controlling the incident laser power and the laser focus scan speed up to 700 μ m ∕ s . Based on repolymerization between two structures close to each other, the feature size was further reduced to ∼ 15 nm , which demonstrated the potential for three-dimensional nanofabrication with high spatial resolution.