Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane....

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Veröffentlicht in:Applied physics letters 2007-01, Vol.90 (3)
Hauptverfasser: Wang, Zhanshan, Wang, Hongchang, Zhu, Jingtao, Zhang, Zhong, Xu, Yao, Zhang, Shumin, Wu, Wenjuan, Wang, Fengli, Wang, Bei, Liu, Liqin, Chen, Lingyan, Michette, Alan G., Pfauntsch, Slawka J., Keith Powell, A., Schäfers, Franz, Gaupp, Andreas, MacDonald, Mike
Format: Artikel
Sprache:eng
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Zusammenfassung:Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5nm, and the corresponding s-component transmission (Ts) decreased from 6% to 2% with increasing wavelength.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2431761