Combinatorial-mold imprint lithography: A versatile technique for fabrication of three-dimensional polymer structures

A two-step fabrication technique based on nanoimprint lithography is described for the fabrication of three-dimensional micro- and nanostructures. By combining simple two-dimensional geometries from two molds, complex and useful three-dimensional structures are obtained. The careful selection of mol...

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Veröffentlicht in:	Applied physics letters 2006-07, Vol.89 (2)
Hauptverfasser:	Low, Hong Yee, Zhao, Wei, Dumond, Jarrett
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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