Effect of collisions in the stratified presheath in electronegative plasmas
The effect of collisions in the formation of a stratified presheath in electronegative plasmas is analyzed. Collisions do not affect to the sheath-presheath structure in pure electropositive plasmas; however, in the case of electronegative plasmas, they can produce a large effect, changing the elect...
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Veröffentlicht in: | Applied physics letters 2006-06, Vol.88 (26), p.261502-261502-3 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | The effect of collisions in the formation of a stratified presheath in electronegative plasmas is analyzed. Collisions do not affect to the sheath-presheath structure in pure electropositive plasmas; however, in the case of electronegative plasmas, they can produce a large effect, changing the electric potential distribution in the presheath from monotonic to oscillatory, and viceversa. The influence of the collision rate on the plasma parameter space region in which the presheath becomes stratified is analyzed. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2218319 |