Effect of oxygen plasma treatment on reduction of contact resistivity at pentacene/Au interface

We report the reduction of contact resistivity between Au and pentacene by O2 plasma treatment. Contact resistance dramatically reduced from 5.65to0.22MΩcm by the treatment. O2 plasma treatment transformed Au to AuOx, increasing the surface energy from 45.1to71.5mJ∕m2. Molecular adsorption geometry...

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Veröffentlicht in:Applied physics letters 2006-06, Vol.88 (26)
Hauptverfasser: Kim, Woong-Kwon, Lee, Jong-Lam
Format: Artikel
Sprache:eng
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Zusammenfassung:We report the reduction of contact resistivity between Au and pentacene by O2 plasma treatment. Contact resistance dramatically reduced from 5.65to0.22MΩcm by the treatment. O2 plasma treatment transformed Au to AuOx, increasing the surface energy from 45.1to71.5mJ∕m2. Molecular adsorption geometry of pentacene on AuOx changed from a planar structure to an upright type, improving crystallinity and molecular packing. Thus, defects and traps at the interface were reduced, decreasing the contact resistance between Au and pentacene.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2218044