X-ray diffraction and Raman investigations of thickness dependent stress effects on Pb(ZrxTi1−x)O3 thin films
Microstructure, film orientation, and optical transmission spectra of polycrystalline Nd-modified Pb(ZrxTi1−x)O3 films were studied as a function of film thickness. Pulsed laser deposition was used for the fabrication of films with thickness from 80to465nm on single-crystal MgO(100) substrates. Rama...
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Veröffentlicht in: | Applied physics letters 2006-06, Vol.88 (25) |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Microstructure, film orientation, and optical transmission spectra of polycrystalline Nd-modified Pb(ZrxTi1−x)O3 films were studied as a function of film thickness. Pulsed laser deposition was used for the fabrication of films with thickness from 80to465nm on single-crystal MgO(100) substrates. Raman spectroscopy, x-ray diffraction, and spectrophotometry measurements were utilized in the film characterization. With the decreasing film thickness, films first oriented with c axis perpendicular to film surface, and then, after some critical thickness, changed to a-axis orientation. At the same time, compressive stress increased up to 1.3GPa and a clear blueshift of the optical absorption edge was found in transmission spectra. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2216895 |