Two-dimensional array of coupled nanomechanical resonators
Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation...
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| Veröffentlicht in: | Applied physics letters 2006-04, Vol.88 (14), p.143504-143504-3 |
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| Sprache: | eng |
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| container_end_page | 143504-3 |
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| container_issue | 14 |
| container_start_page | 143504 |
| container_title | Applied physics letters |
| container_volume | 88 |
| creator | Zalalutdinov, Maxim K. Baldwin, Jeffrey W. Marcus, Martin H. Reichenbach, Robert B. Parpia, Jeevak M. Houston, Brian H. |
| description | Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our
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array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed. |
| doi_str_mv | 10.1063/1.2190448 |
| format | Article |
| fullrecord | <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_2190448</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>apl</sourcerecordid><originalsourceid>FETCH-LOGICAL-c350t-a1f9e6e77d08d00014cbf8d49d176ff51c6913642b17508a06fd54171776d96e3</originalsourceid><addsrcrecordid>eNp1z01LAzEQgOEgCtbqwX-wVw-pM5uvXQ-CFKtCwUs9hzQfuLK7KcmK9N-b0h68eApDXmZ4CLlFWCBIdo-LGlvgvDkjMwSlKENszskMABiVrcBLcpXzVxlFzdiMPGx-InXd4MfcxdH0lUnJ7KsYKhu_d7131WjGOHj7acbOlv_kc-mmmPI1uQimz_7m9M7Jx-p5s3yl6_eXt-XTmlomYKIGQ-ulV8pB48pd5HYbGsdbh0qGINDKFpnk9RaVgMaADE5wVKiUdK30bE7ujnttijknH_QudYNJe42gD2iN-oQu7eOxzbabzFRI_8dFrv_I9UHOfgE_vF5I</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>Two-dimensional array of coupled nanomechanical resonators</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><creator>Zalalutdinov, Maxim K. ; Baldwin, Jeffrey W. ; Marcus, Martin H. ; Reichenbach, Robert B. ; Parpia, Jeevak M. ; Houston, Brian H.</creator><creatorcontrib>Zalalutdinov, Maxim K. ; Baldwin, Jeffrey W. ; Marcus, Martin H. ; Reichenbach, Robert B. ; Parpia, Jeevak M. ; Houston, Brian H.</creatorcontrib><description>Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our
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array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.2190448</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>American Institute of Physics</publisher><ispartof>Applied physics letters, 2006-04, Vol.88 (14), p.143504-143504-3</ispartof><rights>2006 American Institute of Physics</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c350t-a1f9e6e77d08d00014cbf8d49d176ff51c6913642b17508a06fd54171776d96e3</citedby><cites>FETCH-LOGICAL-c350t-a1f9e6e77d08d00014cbf8d49d176ff51c6913642b17508a06fd54171776d96e3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.2190448$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,776,780,790,1553,4498,27901,27902,76126,76132</link.rule.ids></links><search><creatorcontrib>Zalalutdinov, Maxim K.</creatorcontrib><creatorcontrib>Baldwin, Jeffrey W.</creatorcontrib><creatorcontrib>Marcus, Martin H.</creatorcontrib><creatorcontrib>Reichenbach, Robert B.</creatorcontrib><creatorcontrib>Parpia, Jeevak M.</creatorcontrib><creatorcontrib>Houston, Brian H.</creatorcontrib><title>Two-dimensional array of coupled nanomechanical resonators</title><title>Applied physics letters</title><description>Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our
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array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed.</description><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2006</creationdate><recordtype>article</recordtype><recordid>eNp1z01LAzEQgOEgCtbqwX-wVw-pM5uvXQ-CFKtCwUs9hzQfuLK7KcmK9N-b0h68eApDXmZ4CLlFWCBIdo-LGlvgvDkjMwSlKENszskMABiVrcBLcpXzVxlFzdiMPGx-InXd4MfcxdH0lUnJ7KsYKhu_d7131WjGOHj7acbOlv_kc-mmmPI1uQimz_7m9M7Jx-p5s3yl6_eXt-XTmlomYKIGQ-ulV8pB48pd5HYbGsdbh0qGINDKFpnk9RaVgMaADE5wVKiUdK30bE7ujnttijknH_QudYNJe42gD2iN-oQu7eOxzbabzFRI_8dFrv_I9UHOfgE_vF5I</recordid><startdate>20060403</startdate><enddate>20060403</enddate><creator>Zalalutdinov, Maxim K.</creator><creator>Baldwin, Jeffrey W.</creator><creator>Marcus, Martin H.</creator><creator>Reichenbach, Robert B.</creator><creator>Parpia, Jeevak M.</creator><creator>Houston, Brian H.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20060403</creationdate><title>Two-dimensional array of coupled nanomechanical resonators</title><author>Zalalutdinov, Maxim K. ; Baldwin, Jeffrey W. ; Marcus, Martin H. ; Reichenbach, Robert B. ; Parpia, Jeevak M. ; Houston, Brian H.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c350t-a1f9e6e77d08d00014cbf8d49d176ff51c6913642b17508a06fd54171776d96e3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2006</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Zalalutdinov, Maxim K.</creatorcontrib><creatorcontrib>Baldwin, Jeffrey W.</creatorcontrib><creatorcontrib>Marcus, Martin H.</creatorcontrib><creatorcontrib>Reichenbach, Robert B.</creatorcontrib><creatorcontrib>Parpia, Jeevak M.</creatorcontrib><creatorcontrib>Houston, Brian H.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Zalalutdinov, Maxim K.</au><au>Baldwin, Jeffrey W.</au><au>Marcus, Martin H.</au><au>Reichenbach, Robert B.</au><au>Parpia, Jeevak M.</au><au>Houston, Brian H.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Two-dimensional array of coupled nanomechanical resonators</atitle><jtitle>Applied physics letters</jtitle><date>2006-04-03</date><risdate>2006</risdate><volume>88</volume><issue>14</issue><spage>143504</spage><epage>143504-3</epage><pages>143504-143504-3</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our
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array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed.</abstract><pub>American Institute of Physics</pub><doi>10.1063/1.2190448</doi></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2006-04, Vol.88 (14), p.143504-143504-3 |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_2190448 |
| source | AIP Journals Complete; AIP Digital Archive |
| title | Two-dimensional array of coupled nanomechanical resonators |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-04T17%3A05%3A22IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=Two-dimensional%20array%20of%20coupled%20nanomechanical%20resonators&rft.jtitle=Applied%20physics%20letters&rft.au=Zalalutdinov,%20Maxim%20K.&rft.date=2006-04-03&rft.volume=88&rft.issue=14&rft.spage=143504&rft.epage=143504-3&rft.pages=143504-143504-3&rft.issn=0003-6951&rft.eissn=1077-3118&rft.coden=APPLAB&rft_id=info:doi/10.1063/1.2190448&rft_dat=%3Cscitation_cross%3Eapl%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |