Two-dimensional array of coupled nanomechanical resonators

Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our 20 × 20 array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed.