Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electrol...

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Veröffentlicht in:Applied physics letters 2006-02, Vol.88 (8), p.083110-083110-3
Hauptverfasser: Formanek, Florian, Takeyasu, Nobuyuki, Tanaka, Takuo, Chiyoda, Kenta, Ishikawa, Atsushi, Kawata, Satoshi
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container_end_page 083110-3
container_issue 8
container_start_page 083110
container_title Applied physics letters
container_volume 88
creator Formanek, Florian
Takeyasu, Nobuyuki
Tanaka, Takuo
Chiyoda, Kenta
Ishikawa, Atsushi
Kawata, Satoshi
description We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.
doi_str_mv 10.1063/1.2178261
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title Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures
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