Selective electroless plating to fabricate complex three-dimensional metallic micro/nanostructures

We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electrol...

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Veröffentlicht in:Applied physics letters 2006-02, Vol.88 (8), p.083110-083110-3
Hauptverfasser: Formanek, Florian, Takeyasu, Nobuyuki, Tanaka, Takuo, Chiyoda, Kenta, Ishikawa, Atsushi, Kawata, Satoshi
Format: Artikel
Sprache:eng
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Zusammenfassung:We report on selective metal deposition over complex polymer structures formed by two-photon induced photopolymerization technique. Periodic three-dimensional micro/nanostructures are fabricated by means of a microlens array to produce multiple spots from a single-beam femtosecond laser. An electroless plating method is used to deposit a thin silver film onto the sample surface. The glass slide surface supporting the structures is chemically modified to avoid silver coating of the substrate. Our technique enables to produce complex metallic structures with arbitrary shapes under ambient conditions.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2178261