Low-threshold-current operation of 1540 nm GaInAsP ∕ InP distributed-feedback lasers with multiple-quantum-wire active regions

1540 nm wavelength GaInAsP ∕ InP distributed-feedback lasers consisting of multiple-quantum-wire active regions with the wire width of 24 nm were realized by electron-beam lithography, CH 4 ∕ H 2 reactive ion etching, and two-step organometallic vapor-phase-epitaxial growth processes. A threshold cu...

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Veröffentlicht in:Applied physics letters 2005-11, Vol.87 (22), p.223120-223120-3
Hauptverfasser: Yagi, Hideki, Miura, Koji, Nishimoto, Yoshifumi, Plumwongrot, Dhanorm, Ohira, Kazuya, Maruyama, Takeo, Arai, Shigehisa
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Sprache:eng
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Zusammenfassung:1540 nm wavelength GaInAsP ∕ InP distributed-feedback lasers consisting of multiple-quantum-wire active regions with the wire width of 24 nm were realized by electron-beam lithography, CH 4 ∕ H 2 reactive ion etching, and two-step organometallic vapor-phase-epitaxial growth processes. A threshold current as low as 2.7 mA ( threshold current density = 270 A ∕ cm 2 ) , a differential quantum efficiency of 19 % ∕ facet and a submode suppression ratio of 51 dB at a bias current of twice the threshold were achieved for the stripe width of 3.0 μ m and the cavity length of 330 μ m under a room-temperature continuous-wave condition.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.2138789