Simulation of a semitransparent conducting mesh electrode for plasma immersion ion implantation

Particle-in-cell simulations of plasma evolution in the vicinity of a mesh electrode that is semitransparent to ions are presented. Space-charge accumulation and ion focusing have an important effect on the ion trajectories and ion energy distribution inside the mesh. The results indicate that when...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Veröffentlicht in:Physics of plasmas 2005-09, Vol.12 (9), p.093507-093507-6
Hauptverfasser: Powles, R. C., Kwok, D. T. K., McKenzie, D. R., Bilek, M. M. M.
Format: Artikel
Sprache:eng
Schlagworte:
Online-Zugang:Volltext
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:Particle-in-cell simulations of plasma evolution in the vicinity of a mesh electrode that is semitransparent to ions are presented. Space-charge accumulation and ion focusing have an important effect on the ion trajectories and ion energy distribution inside the mesh. The results indicate that when such an electrode is used to assist plasma immersion ion implantation of insulating targets, the initial plasma conditions and mesh geometry are key factors in achieving optimum dose uniformity and implanted ion energy.
ISSN:1070-664X
1089-7674
DOI:10.1063/1.2039527