High-quality planar high-Tc Josephson junctions
Reproducible high-Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge (1 to 5μm wide) is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7−δ film through a gold mask such as the nonprotected part becomes insulating. A lower Tc...
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Veröffentlicht in: | Applied physics letters 2005-09, Vol.87 (10) |
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Hauptverfasser: | , , , , , |
Format: | Artikel |
Sprache: | eng |
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Zusammenfassung: | Reproducible high-Tc Josephson junctions have been made in a rather simple two-step process using ion irradiation. A microbridge (1 to 5μm wide) is firstly designed by ion irradiating a c-axis-oriented YBa2Cu3O7−δ film through a gold mask such as the nonprotected part becomes insulating. A lower Tc part is then defined within the bridge by irradiating with a much lower fluence through a narrow slit (20 nm) opened in a standard electronic photoresist. These planar junctions, whose settings can be finely tuned, exhibit reproducible and nearly ideal Josephson characteristics. This process can be used to produce complex Josephson circuits. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.2037206 |