Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source

The electrical breakdown characteristics of the rf capacitive plasma source are investigated theoretically and experimentally. The plasma source is the electrode type consisting of the concentric cylinders for generating nonequilibrium plasma at atmospheric pressure. The theoretical model based on t...

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Veröffentlicht in:	Physics of plasmas 2005-09, Vol.12 (9), p.093504-093504-8
Hauptverfasser:	Li, Shou-Zhe, Kang, Jung G., Uhm, Han S.
Format:	Artikel
Sprache:	eng
Schlagworte:	70 PLASMA PHYSICS AND FUSION TECHNOLOGY ATMOSPHERIC PRESSURE CHARGED-PARTICLE TRANSPORT CROSS SECTIONS DIFFUSION ELECTRIC POTENTIAL ELECTRICAL FAULTS ELECTRODES ELECTRON TEMPERATURE HELIUM ION TEMPERATURE MOLECULES NITROGEN NON-EQUILIBRIUM PLASMA OXYGEN SCATTERING VARIATIONS
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