Electrical breakdown characteristics of an atmospheric pressure rf capacitive plasma source

The electrical breakdown characteristics of the rf capacitive plasma source are investigated theoretically and experimentally. The plasma source is the electrode type consisting of the concentric cylinders for generating nonequilibrium plasma at atmospheric pressure. The theoretical model based on the diffusion-controlled breakdown mechanism is proposed to analyze the electrical breakdown phenomenon in this rf capacitive plasma source of the coaxial cylinders. The electron temperature at the electrical breakdown is calculated from the theoretical model, thereby evaluating the electrical breakdown voltages. The experimental data of the electrical breakdown voltage are measured with respect to the variation of the geometric parameters of plasma source, the gas temperature, and the concentration of the foreign reactive gases (oxygen and nitrogen) mixed in the helium gas. The theoretical results of the electrical breakdown voltage agree remarkably well with experimental data. This indicates that not only the electron temperature is important in determining the electrical breakdown voltage, but also the geometric variables, the gas temperature, and the scattering cross sections of molecules play significant roles.