Diode calibration of a Langmuir probe system for measurement of electron energy distribution functions in a plasma
It is shown that a simple circuit consisting of a semiconductor diode, a resistor, and a dc voltage source can model a narrow-energy group of electrons in a plasma for the purpose of calibration of a Langmuir probe. The calibration is appropriate when the probe is used for measurement of the electro...
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Veröffentlicht in: | Review of scientific instruments 2005-08, Vol.76 (8), p.086105-086105-3 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
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Online-Zugang: | Volltext |
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Zusammenfassung: | It is shown that a simple circuit consisting of a semiconductor diode, a resistor, and a dc voltage source can model a narrow-energy group of electrons in a plasma for the purpose of calibration of a Langmuir probe. The calibration is appropriate when the probe is used for measurement of the electron energy distribution function (EEDF). This simple circuit allows real-time determination of sensitivity, energy resolution, and signal-to-noise ratio for probe measurements of the EEDF. |
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ISSN: | 0034-6748 1089-7623 |
DOI: | 10.1063/1.2006287 |