High-quality factor optical microcavities using oxide apertured micropillars

An oxide aperture is used to confine optical modes in a micropillar structure. This method overcomes the limitations due to sidewall scattering loss typical in semiconductor etched micropillars. High cavity quality factors ( Q ) up to 48000 are determined by external Fabry-Perot cavity scanning meas...

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Veröffentlicht in:Applied physics letters 2005-07, Vol.87 (3), p.031105-031105-3
Hauptverfasser: Stoltz, N. G., Rakher, M., Strauf, S., Badolato, A., Lofgreen, D. D., Petroff, P. M., Coldren, L. A., Bouwmeester, D.
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Sprache:eng
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Zusammenfassung:An oxide aperture is used to confine optical modes in a micropillar structure. This method overcomes the limitations due to sidewall scattering loss typical in semiconductor etched micropillars. High cavity quality factors ( Q ) up to 48000 are determined by external Fabry-Perot cavity scanning measurements, a significantly higher value than prior work in III-V etched micropillars. Measured Q values and estimated mode volumes correspond to a maximum Purcell factor figure of merit value of 72.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1999843