Visible electroluminescence from silicon nanocrystals embedded in amorphous silicon nitride matrix

Visible electroluminescence from silicon nanocrystals (Si-NCs) embedded in amorphous silicon nitride (a-SiNx) films has been observed. The Si-NC∕a-SiNx films were deposited by evaporating silicon from electron gun into the inductively coupled plasma of nitrogen. The density of Si-NCs in the a-SiNx m...

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Veröffentlicht in:	Applied physics letters 2005-05, Vol.86 (19)
Hauptverfasser:	Chen, Liang-Yih, Chen, Wen-Hua, Hong, Franklin Chau-Nan
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
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