Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube

Fabrication and characterization of a nanoelectromechanical switching device consisting of a suspended multiwalled carbon nanotube and self-aligned electrodes is reported. The device has a triode structure and is designed so that a suspended carbon nanotube is mechanically switched to one of two self-aligned electrodes by repulsive electrostatic forces between the nanotube and the other self-aligned electrode. Carbon nanotubes are dispersed on an SiO2 coated Si wafer and their locations recorded using a scanning electron microscope mapping process. Contact electrodes and self-aligned deflection electrodes are formed by a process comprising electron beam lithography, metallic thin film deposition, and lift-off. The electrical measurements show well-defined ON and OFF states with change of gate voltage. The measured threshold voltage for electromechanical switching is ∼3.6V.