A Fabry-Perot interferometer for micrometer-sized cantilevers
We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of 0.8 mm . At 1 MHz , a noise floor of 1 fm ∕ Hz is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angul...
Gespeichert in:
| Veröffentlicht in: | Applied physics letters 2005-02, Vol.86 (7), p.074101-074101-3 |
|---|---|
| Hauptverfasser: | , , , , , , , , , , |
| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | 074101-3 |
|---|---|
| container_issue | 7 |
| container_start_page | 074101 |
| container_title | Applied physics letters |
| container_volume | 86 |
| creator | Hoogenboom, B. W. Frederix, P. L. T. M. Yang, J. L. Martin, S. Pellmont, Y. Steinacher, M. Zäch, S. Langenbach, E. Heimbeck, H.-J. Engel, A. Hug, H. J. |
| description | We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of
0.8
mm
. At
1
MHz
, a noise floor of
1
fm
∕
Hz
is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces. |
| doi_str_mv | 10.1063/1.1866229 |
| format | Article |
| fullrecord | <record><control><sourceid>scitation_cross</sourceid><recordid>TN_cdi_crossref_primary_10_1063_1_1866229</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>apl</sourcerecordid><originalsourceid>FETCH-LOGICAL-c385t-d27bfe51040e472eaeffb4e332195a753897010602345b10bb717f27b7f6d4b43</originalsourceid><addsrcrecordid>eNp1j0FLxDAUhIMoWFcP_oNePWTNS5qmPSiUxV2FBT3oOSTtC0S2rSRFWH-9cdurpzcDM4_5CLkFtgZWintYQ1WWnNdnJAOmFBUA1TnJGGOClrWES3IV42eykguRkYcm3xobjvQNwzjlfpgwuCR7TCJ3Y8h73y6WRv-DXd6aYfIH_MYQr8mFM4eIN8tdkY_t0_vmme5fdy-bZk9bUcmJdlxZhxJYwbBQHA06ZwsUgkMtjZKiqhVL8xkXhbTArFWgXCopV3aFLcSK3M1_05QYAzr9FXxvwlED03_cGvTCnbKPcza2fjKTH4f_w40-wesTvJ7hxS9dB18O</addsrcrecordid><sourcetype>Aggregation Database</sourcetype><iscdi>true</iscdi><recordtype>article</recordtype></control><display><type>article</type><title>A Fabry-Perot interferometer for micrometer-sized cantilevers</title><source>AIP Journals Complete</source><source>AIP Digital Archive</source><creator>Hoogenboom, B. W. ; Frederix, P. L. T. M. ; Yang, J. L. ; Martin, S. ; Pellmont, Y. ; Steinacher, M. ; Zäch, S. ; Langenbach, E. ; Heimbeck, H.-J. ; Engel, A. ; Hug, H. J.</creator><creatorcontrib>Hoogenboom, B. W. ; Frederix, P. L. T. M. ; Yang, J. L. ; Martin, S. ; Pellmont, Y. ; Steinacher, M. ; Zäch, S. ; Langenbach, E. ; Heimbeck, H.-J. ; Engel, A. ; Hug, H. J.</creatorcontrib><description>We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of
0.8
mm
. At
1
MHz
, a noise floor of
1
fm
∕
Hz
is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces.</description><identifier>ISSN: 0003-6951</identifier><identifier>EISSN: 1077-3118</identifier><identifier>DOI: 10.1063/1.1866229</identifier><identifier>CODEN: APPLAB</identifier><language>eng</language><publisher>American Institute of Physics</publisher><ispartof>Applied physics letters, 2005-02, Vol.86 (7), p.074101-074101-3</ispartof><rights>2005 American Institute of Physics</rights><lds50>peer_reviewed</lds50><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed><citedby>FETCH-LOGICAL-c385t-d27bfe51040e472eaeffb4e332195a753897010602345b10bb717f27b7f6d4b43</citedby><cites>FETCH-LOGICAL-c385t-d27bfe51040e472eaeffb4e332195a753897010602345b10bb717f27b7f6d4b43</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://pubs.aip.org/apl/article-lookup/doi/10.1063/1.1866229$$EHTML$$P50$$Gscitation$$H</linktohtml><link.rule.ids>314,776,780,790,1553,4498,27901,27902,76127,76133</link.rule.ids></links><search><creatorcontrib>Hoogenboom, B. W.</creatorcontrib><creatorcontrib>Frederix, P. L. T. M.</creatorcontrib><creatorcontrib>Yang, J. L.</creatorcontrib><creatorcontrib>Martin, S.</creatorcontrib><creatorcontrib>Pellmont, Y.</creatorcontrib><creatorcontrib>Steinacher, M.</creatorcontrib><creatorcontrib>Zäch, S.</creatorcontrib><creatorcontrib>Langenbach, E.</creatorcontrib><creatorcontrib>Heimbeck, H.-J.</creatorcontrib><creatorcontrib>Engel, A.</creatorcontrib><creatorcontrib>Hug, H. J.</creatorcontrib><title>A Fabry-Perot interferometer for micrometer-sized cantilevers</title><title>Applied physics letters</title><description>We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of
0.8
mm
. At
1
MHz
, a noise floor of
1
fm
∕
Hz
is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces.</description><issn>0003-6951</issn><issn>1077-3118</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2005</creationdate><recordtype>article</recordtype><recordid>eNp1j0FLxDAUhIMoWFcP_oNePWTNS5qmPSiUxV2FBT3oOSTtC0S2rSRFWH-9cdurpzcDM4_5CLkFtgZWintYQ1WWnNdnJAOmFBUA1TnJGGOClrWES3IV42eykguRkYcm3xobjvQNwzjlfpgwuCR7TCJ3Y8h73y6WRv-DXd6aYfIH_MYQr8mFM4eIN8tdkY_t0_vmme5fdy-bZk9bUcmJdlxZhxJYwbBQHA06ZwsUgkMtjZKiqhVL8xkXhbTArFWgXCopV3aFLcSK3M1_05QYAzr9FXxvwlED03_cGvTCnbKPcza2fjKTH4f_w40-wesTvJ7hxS9dB18O</recordid><startdate>20050214</startdate><enddate>20050214</enddate><creator>Hoogenboom, B. W.</creator><creator>Frederix, P. L. T. M.</creator><creator>Yang, J. L.</creator><creator>Martin, S.</creator><creator>Pellmont, Y.</creator><creator>Steinacher, M.</creator><creator>Zäch, S.</creator><creator>Langenbach, E.</creator><creator>Heimbeck, H.-J.</creator><creator>Engel, A.</creator><creator>Hug, H. J.</creator><general>American Institute of Physics</general><scope>AAYXX</scope><scope>CITATION</scope></search><sort><creationdate>20050214</creationdate><title>A Fabry-Perot interferometer for micrometer-sized cantilevers</title><author>Hoogenboom, B. W. ; Frederix, P. L. T. M. ; Yang, J. L. ; Martin, S. ; Pellmont, Y. ; Steinacher, M. ; Zäch, S. ; Langenbach, E. ; Heimbeck, H.-J. ; Engel, A. ; Hug, H. J.</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c385t-d27bfe51040e472eaeffb4e332195a753897010602345b10bb717f27b7f6d4b43</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2005</creationdate><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Hoogenboom, B. W.</creatorcontrib><creatorcontrib>Frederix, P. L. T. M.</creatorcontrib><creatorcontrib>Yang, J. L.</creatorcontrib><creatorcontrib>Martin, S.</creatorcontrib><creatorcontrib>Pellmont, Y.</creatorcontrib><creatorcontrib>Steinacher, M.</creatorcontrib><creatorcontrib>Zäch, S.</creatorcontrib><creatorcontrib>Langenbach, E.</creatorcontrib><creatorcontrib>Heimbeck, H.-J.</creatorcontrib><creatorcontrib>Engel, A.</creatorcontrib><creatorcontrib>Hug, H. J.</creatorcontrib><collection>CrossRef</collection><jtitle>Applied physics letters</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Hoogenboom, B. W.</au><au>Frederix, P. L. T. M.</au><au>Yang, J. L.</au><au>Martin, S.</au><au>Pellmont, Y.</au><au>Steinacher, M.</au><au>Zäch, S.</au><au>Langenbach, E.</au><au>Heimbeck, H.-J.</au><au>Engel, A.</au><au>Hug, H. J.</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>A Fabry-Perot interferometer for micrometer-sized cantilevers</atitle><jtitle>Applied physics letters</jtitle><date>2005-02-14</date><risdate>2005</risdate><volume>86</volume><issue>7</issue><spage>074101</spage><epage>074101-3</epage><pages>074101-074101-3</pages><issn>0003-6951</issn><eissn>1077-3118</eissn><coden>APPLAB</coden><abstract>We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of
0.8
mm
. At
1
MHz
, a noise floor of
1
fm
∕
Hz
is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces.</abstract><pub>American Institute of Physics</pub><doi>10.1063/1.1866229</doi><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext |
| identifier | ISSN: 0003-6951 |
| ispartof | Applied physics letters, 2005-02, Vol.86 (7), p.074101-074101-3 |
| issn | 0003-6951 1077-3118 |
| language | eng |
| recordid | cdi_crossref_primary_10_1063_1_1866229 |
| source | AIP Journals Complete; AIP Digital Archive |
| title | A Fabry-Perot interferometer for micrometer-sized cantilevers |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2025-02-01T17%3A47%3A16IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-scitation_cross&rft_val_fmt=info:ofi/fmt:kev:mtx:journal&rft.genre=article&rft.atitle=A%20Fabry-Perot%20interferometer%20for%20micrometer-sized%20cantilevers&rft.jtitle=Applied%20physics%20letters&rft.au=Hoogenboom,%20B.%20W.&rft.date=2005-02-14&rft.volume=86&rft.issue=7&rft.spage=074101&rft.epage=074101-3&rft.pages=074101-074101-3&rft.issn=0003-6951&rft.eissn=1077-3118&rft.coden=APPLAB&rft_id=info:doi/10.1063/1.1866229&rft_dat=%3Cscitation_cross%3Eapl%3C/scitation_cross%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |