A Fabry-Perot interferometer for micrometer-sized cantilevers

A Fabry-Perot interferometer for micrometer-sized cantilevers

We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of 0.8 mm . At 1 MHz , a noise floor of 1 fm ∕ Hz is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angul...

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Veröffentlicht in:Applied physics letters 2005-02, Vol.86 (7), p.074101-074101-3
Hauptverfasser: Hoogenboom, B. W., Frederix, P. L. T. M., Yang, J. L., Martin, S., Pellmont, Y., Steinacher, M., Zäch, S., Langenbach, E., Heimbeck, H.-J., Engel, A., Hug, H. J.
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Sprache:eng
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Zusammenfassung:We have developed a Fabry-Perot interferometer detecting the deflection of micrometer-sized cantilevers and other micromechanical devices, at a working distance of 0.8 mm . At 1 MHz , a noise floor of 1 fm ∕ Hz is obtained. The detector is mounted on a piezo motor for three-axis alignment. The angular alignment is not critical. The interferometer can be operated in vacuum, air, and liquid. It is particularly suited for scanning force microscopy with small cantilevers, or with larger cantilevers simultaneously monitoring vertical and lateral forces.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1866229