Microtomography and improved resolution in cathodoluminescence microscopy using confocal mirror optics

Cathodoluminescence in scanning electron microscopy observed using an ellipsoidal confocal light collector system can offer improved resolution and an implementation of microtomography. With this signal collection system, the resolution limit is no longer determined by the beam and specimen properties but by the system optics. This possibility is demonstrated by the modeling of light transport in cathodoluminescent materials and in the ellipsoidal confocal system which collects the light emission. The conditions for the high-resolution three-dimensional visualization of microstructure within the generation volume of cathodoluminescence emission is described.