Room temperature synthesis of carbon nanofibers containing nitrogen by plasma-enhanced chemical vapor deposition
This letter reports low-pressure, room-temperature growth of carbon nanofibers containing nitrogen by plasma chemical vapor deposition arrangement. By alternating pure acetylene plasma and afterglow pure nitrogen high dense plasma, a fine control of the fibers growth kinetic is obtained. This layer-...
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Veröffentlicht in: | Applied physics letters 2004-08, Vol.85 (7), p.1244-1246 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | This letter reports low-pressure, room-temperature growth of carbon nanofibers containing nitrogen by plasma chemical vapor deposition arrangement. By alternating pure acetylene plasma and afterglow pure nitrogen high dense plasma, a fine control of the fibers growth kinetic is obtained. This layer-by-layer deposition technique takes advantage of nitrogen chemical etching effects during the growth of nitrogen-doped carbon nanofibers. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1781352 |