Room temperature synthesis of carbon nanofibers containing nitrogen by plasma-enhanced chemical vapor deposition

This letter reports low-pressure, room-temperature growth of carbon nanofibers containing nitrogen by plasma chemical vapor deposition arrangement. By alternating pure acetylene plasma and afterglow pure nitrogen high dense plasma, a fine control of the fibers growth kinetic is obtained. This layer-...

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Veröffentlicht in:Applied physics letters 2004-08, Vol.85 (7), p.1244-1246
Hauptverfasser: Minea, T. M., Point, S., Granier, A., Touzeau, M.
Format: Artikel
Sprache:eng
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Zusammenfassung:This letter reports low-pressure, room-temperature growth of carbon nanofibers containing nitrogen by plasma chemical vapor deposition arrangement. By alternating pure acetylene plasma and afterglow pure nitrogen high dense plasma, a fine control of the fibers growth kinetic is obtained. This layer-by-layer deposition technique takes advantage of nitrogen chemical etching effects during the growth of nitrogen-doped carbon nanofibers.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1781352