Power consideration in the pulsed dielectric barrier discharge at atmospheric pressure
Nonequilibrium, atmospheric pressure discharges are rapidly becoming an important technological component in material processing applications. Amongst their attractive features is the ability to achieve enhanced gas phase chemistry without the need for elevated gas temperatures. To further enhance t...
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Veröffentlicht in: | Journal of applied physics 2004-09, Vol.96 (5), p.3028-3030 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Nonequilibrium, atmospheric pressure discharges are rapidly becoming an important technological component in material processing applications. Amongst their attractive features is the ability to achieve enhanced gas phase chemistry without the need for elevated gas temperatures. To further enhance the plasma chemistry, pulsed operation with pulse widths in the nanoseconds range has been suggested. We report on a specially designed, dielectric barrier discharge based diffuse pulsed discharge and its electrical characteristics. Two current pulses corresponding to two consecutive discharges are generated per voltage pulse. The second discharge, which occurs at the falling edge of the voltage pulse, is induced by the charges stored on the electrode dielectric during the initial discharge. Therefore, the power supplied to ignite the first discharge is partly stored to later ignite a second discharge when the applied voltage decays. This process ultimately leads to a much improved power transfer to the plasma. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.1777392 |