The Ellipsometer, an Apparatus to Measure Thicknesses of Thin Surface Films
An apparatus designed to determine the thickness of films deposited on metal slides is described. It is based on the measurement of the change that takes place in ellipticity of the light reflected after a slide has been coated with the film under investigation. The apparatus is capable of measuring...
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| Veröffentlicht in: | Review of scientific instruments 1945-02, Vol.16 (2), p.26-30 |
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| Format: | Artikel |
| Sprache: | eng |
| Online-Zugang: | Volltext |
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| Zusammenfassung: | An apparatus designed to determine the thickness of films deposited on metal slides is described. It is based on the measurement of the change that takes place in ellipticity of the light reflected after a slide has been coated with the film under investigation. The apparatus is capable of measuring a film thickness within ±0.3A, a sensitivity at least ten times greater than that obtained with the method based on light interference. |
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| ISSN: | 0034-6748 1089-7623 |
| DOI: | 10.1063/1.1770315 |