Electron transport in the downstream region of planar unbalanced magnetron discharge

In this study, we will investigate the electron transport in the downstream region of a planar and unbalanced (type II) magnetron discharge. The effects of the anode sheath boundary and diverging magnetic field on the electron kinetics such as the electron loss mechanism at plasma-sheath boundary an...

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Veröffentlicht in:Journal of applied physics 2004-08, Vol.96 (3), p.1310-1317
Hauptverfasser: Seo, Sang-Hun, Chang, Hong-Young
Format: Artikel
Sprache:eng
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Zusammenfassung:In this study, we will investigate the electron transport in the downstream region of a planar and unbalanced (type II) magnetron discharge. The effects of the anode sheath boundary and diverging magnetic field on the electron kinetics such as the electron loss mechanism at plasma-sheath boundary and the electron distribution function will be examined through the probe measurements. The spatially resolved probe measurements reveal the existence of an electron drift from the cathode fall region to the downstream region. It is found that this drift is caused by the axial gradient of magnetic field (the magnetic mirror force) and then derives an electron current to the grounded substrate on which the potential of the sheath is very low; so the current balance between the cathode and anode currents is kept. The experimental results show that the electron transport in the downstream region is not governed by the classical diffusion (mobility and diffusion dominated) but is dominated by the modified diffusion including the electron drift caused by the magnetic mirror force. Additionally, the mechanism and the experimental evidence on the presence of a non-Maxwellian electron energy distribution function (in particular, bi-Maxwellian distribution) in magnetron discharge will be presented showing that the non-Maxwellian electron energy distribution function is due to the combined effects of the electron drift toward the substrate and the sheath boundary condition.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1767620