Radio‐Frequency Induction Vacuum Furnace for Clean Target Preparation

A furnace is described which outgasses the backing disk and then evaporates target material into the disk without immediate exposure to air. Many targets can be evaporated from one outgassed wetted crucible.

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Veröffentlicht in:Review of scientific instruments 1959-01, Vol.30 (9), p.837-838
Hauptverfasser: Moore, R. A., Seagondollar, L. W., Smith, R. B.
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container_end_page 838
container_issue 9
container_start_page 837
container_title Review of scientific instruments
container_volume 30
creator Moore, R. A.
Seagondollar, L. W.
Smith, R. B.
description A furnace is described which outgasses the backing disk and then evaporates target material into the disk without immediate exposure to air. Many targets can be evaporated from one outgassed wetted crucible.
doi_str_mv 10.1063/1.1716774
format Article
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identifier ISSN: 0034-6748
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subjects AIR
EVAPORATION
FURNACES
GASES
IMPURITIES
INDUCTION
OTHER INSTRUMENTATION
PREPARATION
RADIO WAVES
SURFACES
TARGETS
VACUUM
title Radio‐Frequency Induction Vacuum Furnace for Clean Target Preparation
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