Radio‐Frequency Induction Vacuum Furnace for Clean Target Preparation

Radio‐Frequency Induction Vacuum Furnace for Clean Target Preparation

A furnace is described which outgasses the backing disk and then evaporates target material into the disk without immediate exposure to air. Many targets can be evaporated from one outgassed wetted crucible.

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Bibliographische Detailangaben
Veröffentlicht in:Review of scientific instruments 1959-01, Vol.30 (9), p.837-838
Hauptverfasser: Moore, R. A., Seagondollar, L. W., Smith, R. B.
Format: Artikel
Sprache:eng
Schlagworte:
AIR
EVAPORATION
FURNACES
GASES
IMPURITIES
INDUCTION
OTHER INSTRUMENTATION
PREPARATION
RADIO WAVES
SURFACES
TARGETS
VACUUM
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Beschreibung
Zusammenfassung:A furnace is described which outgasses the backing disk and then evaporates target material into the disk without immediate exposure to air. Many targets can be evaporated from one outgassed wetted crucible.
ISSN:0034-6748
1089-7623
DOI:10.1063/1.1716774