Hillocks on Sputtered Ge Surfaces

Hillocks on Sputtered Ge Surfaces

Evidence for the formation of hillocks on sputtered germanium surfaces was obtained by bombarding lowindex faces of single crystals with argon ions under various conditions. In all cases the argon was ionized by a hot filament gun, at pressures from 10/sup -2/ to 10/sup -3/ mm. Bombarding energies r...

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Veröffentlicht in:Journal of Applied Physics (U.S.) 1963-08, Vol.34 (8), p.2488-2489
Hauptverfasser: Haneman, D., Chung, M. F.
Format: Artikel
Sprache:eng
Schlagworte:
ARGON
CURRENTS
DENSITY
ENERGY RANGE
EV RANGE
GERMANIUM
HEATING
ION BEAMS
ION SOURCES
IONIZATION
IRRADIATION
LATTICES
MONOCRYSTALS
PHYSICS
PRESSURE
SPUTTERING
SURFACES
TARGETS
WIRES
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Beschreibung
Zusammenfassung:Evidence for the formation of hillocks on sputtered germanium surfaces was obtained by bombarding lowindex faces of single crystals with argon ions under various conditions. In all cases the argon was ionized by a hot filament gun, at pressures from 10/sup -2/ to 10/sup -3/ mm. Bombarding energies ranged from 300 to 500 ev at current densities up to 0.5 m amp/cm/sup 2/. (R.E.U.)
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1702771