Extension of the double resonator technique

The application possibilities of the double resonator technique for simultaneous thin-film areal mass density and integrated lateral stress measurements have been expanded by removing the requirement of equal film thicknesses on both resonators. Several situations with either or both of the integrat...

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Veröffentlicht in:Journal of applied physics 1973-10, Vol.44 (10), p.4482-4485
1. Verfasser: EerNisse, E. P.
Format: Artikel
Sprache:eng
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Zusammenfassung:The application possibilities of the double resonator technique for simultaneous thin-film areal mass density and integrated lateral stress measurements have been expanded by removing the requirement of equal film thicknesses on both resonators. Several situations with either or both of the integrated stress or the areal mass density being proportional to film thickness are treated. The new equations are tested with Er metal film deposition and hydriding results.
ISSN:0021-8979
1089-7550
DOI:10.1063/1.1661986