OBSERVATIONS OF {111} ATOMIC PLANES IN SILICON

Using a Philips EM300 electron microscope and chemically thinned slices cut from a single crystal of silicon, the {111} atomic planes of 3.138-Å spacing have been imaged. A two-beam tilted illumination technique was employed.

Gespeichert in:

Bibliographische Detailangaben
Veröffentlicht in:	Applied physics letters 1968-07, Vol.13 (2), p.67-68
Hauptverfasser:	Phillips, V. A., Hugo, J. A.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Using a Philips EM300 electron microscope and chemically thinned slices cut from a single crystal of silicon, the {111} atomic planes of 3.138-Å spacing have been imaged. A two-beam tilted illumination technique was employed.
ISSN:	0003-6951 1077-3118
DOI:	10.1063/1.1652510