Kinetic of phase transformation of SrBi2Ta2O9 deposited by metalorganic decomposition on platinum electrodes

SrBi 2 Ta 2 O 9 thin films were prepared by metalorganic decomposition on Pt/Ti/SiO2/Si substrates and subsequently crystallized at temperatures ranging from 600 to 700 °C for 40 to 225 min. Data of the Aurivillius surface coverage taken from atomic force microscopy measurements were used to model the kinetics of isothermal phase transformation from the fluorite to the Aurivillius phase. A two-dimensional growth mechanism at a decreasing nucleation rate can be deduced. By evaluating the temperature dependence of the growth rates, an activation energy for phase transformation of 318 kJ/mol is determined.