Extraction of positive and negative ions from electron-beam-generated plasmas

Extraction of positive and negative ions from electron-beam-generated plasmas

The results of investigations using pulsed, electron-beam-produced plasmas in Ar/SF6 mixtures are reported. Time-resolved, positive, and negative ion fluxes were measured at a biased electrode located adjacent to the plasma. The measurements indicate that plasmas form with large negative ion densiti...

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Veröffentlicht in:Applied physics letters 2002-08, Vol.81 (6), p.987-989
Hauptverfasser: Walton, S. G., Leonhardt, D., Fernsler, R. F., Meger, R. A.
Format: Artikel
Sprache:eng
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Zusammenfassung:The results of investigations using pulsed, electron-beam-produced plasmas in Ar/SF6 mixtures are reported. Time-resolved, positive, and negative ion fluxes were measured at a biased electrode located adjacent to the plasma. The measurements indicate that plasmas form with large negative ion densities due to electron attachment to SF6 at the low electron temperatures associated with electron-beam-generated plasmas.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1498502