Generation of high-resolution surface temperature distributions
We have performed numerical calculations to study the generation of arbitrary temperature profiles with high spatial resolution on the surface of a solid. The characteristics of steady-state distributions and time-dependent heating and cooling cycles are examined, as well as their dependence on mate...
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Veröffentlicht in: | Journal of applied physics 2002-05, Vol.91 (9), p.5686-5693 |
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Hauptverfasser: | , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We have performed numerical calculations to study the generation of arbitrary temperature profiles with high spatial resolution on the surface of a solid. The characteristics of steady-state distributions and time-dependent heating and cooling cycles are examined, as well as their dependence on material properties and device geometry. Ideally, low-power consumption and fast response times are desirable. The simulations show that the achievable spatial resolution is on the order of the substrate thickness and that the response time t+ depends on the width of the individual heating elements. Moreover, the rise time t+ can be significantly shortened by deposition of a thermal insulation layer, which also reduces the power consumption and increases lateral resolution. |
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ISSN: | 0021-8979 1089-7550 |
DOI: | 10.1063/1.1465506 |