Observations of bi-Maxwellian and single Maxwellian electron energy distribution functions in a capacitively coupled radio-frequency plasmas by laser Thomson scattering

Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pr...

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Veröffentlicht in:Applied physics letters 2001-05, Vol.78 (21), p.3187-3189
Hauptverfasser: Mansour ElSabbagh, M. A., Bowden, M.D., Uchino, K., Muraoka, K.
Format: Artikel
Sprache:eng
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Zusammenfassung:Electron energy distribution functions in low-pressure capacitively coupled radio-frequency argon discharges were measured using the technique of laser Thomson scattering. It was found that the distribution functions changed from a bi-Maxwellian at lower pressures to a single Maxwellian at higher pressures. These measurements provide independent confirmation of probe measurements made in similar discharges. The electron temperature and density of the cold group of electrons were measured with an accuracy of better than 10%.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.1363695