Ferroelectric lead barium zirconate thin film of high fatigue resistance

Highly (100)-textured lead barium zirconate (PBZ) thin films of ∼0.1 μm and with a composition of (Pb0.742+Ba0.262+)(Pb0.154+ Zr0.854+)O3 were grown on LaNiO3/Pt/Ti electrode-coated Si by rf magnetron sputtering at 500 °C. The Pt/PBZ/LaNiO3 capacitor shows a hysteresis loop with remanent polarizatio...

Ausführliche Beschreibung

Bibliographische Detailangaben

Veröffentlicht in:	Applied physics letters 2001-03, Vol.78 (12), p.1721-1723
Hauptverfasser:	Tseng, J. H., Wu, T. B.
Format:	Artikel
Sprache:	eng
Online-Zugang:	Volltext
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!