Ferroelectric lead barium zirconate thin film of high fatigue resistance
Highly (100)-textured lead barium zirconate (PBZ) thin films of ∼0.1 μm and with a composition of (Pb0.742+Ba0.262+)(Pb0.154+ Zr0.854+)O3 were grown on LaNiO3/Pt/Ti electrode-coated Si by rf magnetron sputtering at 500 °C. The Pt/PBZ/LaNiO3 capacitor shows a hysteresis loop with remanent polarizatio...
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Veröffentlicht in: | Applied physics letters 2001-03, Vol.78 (12), p.1721-1723 |
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Hauptverfasser: | , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | Highly (100)-textured lead barium zirconate (PBZ) thin films of ∼0.1 μm and with a composition of (Pb0.742+Ba0.262+)(Pb0.154+ Zr0.854+)O3 were grown on LaNiO3/Pt/Ti electrode-coated Si by rf magnetron sputtering at 500 °C. The Pt/PBZ/LaNiO3 capacitor shows a hysteresis loop with remanent polarization, Pr, of 12 μC/cm2 and coercive field of 185 kV/cm at an applied voltage of 10 V, along with a dielectric constant of 270. More importantly, it has a high fatigue resistance against polarization switching up to 1011 cycles. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.1355299 |