Flexible microdischarge arrays: Metal/polymer devices

Flexible microdischarge arrays have been fabricated in metal–polymer–metal structures having a total thickness of ∼30 μm (∼1.2 mils). Composed of individual cylindrical devices having a diameter of 150 μm, positive differential resistance (30–120 kΩ), and operating voltages as low as 114 V for a 5 μm thick dielectric layer, the arrays operate at pressures beyond 700 Torr of Ne and in 1 atm of air. For Ne pressures ⩽ 200 Torr, emission is produced from Ne ion excited states lying more than 55 eV above the neutral ground state (2p6). The structures reported here are inexpensive to fabricate and have lifetimes beyond 50 h. Arrays that have been sealed by conventional lamination have also been operated successfully.