Field emission from well-aligned, patterned, carbon nanotube emitters

We have developed a process to fabricate well-aligned, patterned, carbon nanotube field emitters on glass substrates. The process consists of depositing and patterning a nickel-based metal line on the glass substrate followed by a bias-enhanced microwave plasma chemical vapor deposition to grow carb...

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Veröffentlicht in:Applied physics letters 2000-03, Vol.76 (13), p.1776-1778
Hauptverfasser: Murakami, Hirohiko, Hirakawa, Masaaki, Tanaka, Chiaki, Yamakawa, Hiroyuki
Format: Artikel
Sprache:eng
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Zusammenfassung:We have developed a process to fabricate well-aligned, patterned, carbon nanotube field emitters on glass substrates. The process consists of depositing and patterning a nickel-based metal line on the glass substrate followed by a bias-enhanced microwave plasma chemical vapor deposition to grow carbon nanotube emitters. A turn-on field of 1.2 V/μm, and emission currents of 1 mA/cm2 at 3 V/μm were achieved on well-aligned carbon nanotube emitters. A test of cathode-ray tube lighting elements now underway suggests a lifetime of exceeding 10 000 h.
ISSN:0003-6951
1077-3118
DOI:10.1063/1.126164