Field emission from well-aligned, patterned, carbon nanotube emitters
We have developed a process to fabricate well-aligned, patterned, carbon nanotube field emitters on glass substrates. The process consists of depositing and patterning a nickel-based metal line on the glass substrate followed by a bias-enhanced microwave plasma chemical vapor deposition to grow carb...
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Veröffentlicht in: | Applied physics letters 2000-03, Vol.76 (13), p.1776-1778 |
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Hauptverfasser: | , , , |
Format: | Artikel |
Sprache: | eng |
Online-Zugang: | Volltext |
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Zusammenfassung: | We have developed a process to fabricate well-aligned, patterned, carbon nanotube field emitters on glass substrates. The process consists of depositing and patterning a nickel-based metal line on the glass substrate followed by a bias-enhanced microwave plasma chemical vapor deposition to grow carbon nanotube emitters. A turn-on field of 1.2 V/μm, and emission currents of 1 mA/cm2 at 3 V/μm were achieved on well-aligned carbon nanotube emitters. A test of cathode-ray tube lighting elements now underway suggests a lifetime of exceeding 10 000 h. |
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ISSN: | 0003-6951 1077-3118 |
DOI: | 10.1063/1.126164 |